Gemini 2 - Dual station Reactor S/N 006

Originally manufactured in 1989 by Gemini Research
Rebuilt by RE Dixon, Inc.
Second Side added in 1998
New lower threshold doors
N and P dopant option
SiH2Cl2 and SiCl4 options
Gas box has been cleaned and all N2 lines replaced
All gas line interconnects cleaned and electropolished.
Lift assembly cleaned, lubed and resealed
Updated susceptor rotation bearing assembly
Right hand console
All cooling lines replaced
Rebuilt bell jar clamps
Ready for your facility now!

 


Gemini 1 - Dual station Reactor S/N 078

Originally manufactured by Gemini Research
N and P dopant option
SiH2Cl2 and SiHl4 options
Very low hours
Reduced pressure option
3 port inject
Unit Instruments Flow Controllers
Excellent condition

Gemini 1 - Single station Reactor S/N 011

Originally manufactured by Gemini Research
N and P dopant option with 2 set points
Fully loaded gas panel SICl4, SiHCl3, SiH2Cl2, and SiH4 options
Two set points for mainstream gas
Less than 50 hours
Like new!